Designing Heating Zones in a Semiconductor Heater for Better Thermal Balance
https://industrial-heater-world.overblog.fr/2026/09/ito-glass-heater-technology-explained-for-engineers-and-designers.html
In etch equipment, a semiconductor heater must deliver heat in a controlled way. It uses a resistive heating element integrated with an electrically insulating structure. One useful trait is repeatable heat delivery