Integrating a Mica Heating Plate Into Compact OEM Assemblies

https://advanced-heater-source.almoheet-travel.com/why-temperature-uniformity-matters-in-wafer-heater-design

In semiconductor support equipment, a mica heating plate must deliver heat in a controlled way. It uses a mica-insulated resistive heater built for plate-style heat transfer. One useful trait is custom plate geometry