Maintenance Planning for Equipment Built Around a Wafer Heater

https://glass-heating-technology.image-perth.org/how-an-ito-glass-heater-combines-transparency-with-surface-heating

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result