Managing Heat Loss Around a Semiconductor Heater for More Stable Operation

https://engineered-heat-solutions.brightsora.com/posts/kapton-heater-vs-silicone-heater-which-design-fits-different-applications

In etch equipment, a semiconductor heater must deliver heat in a controlled way. It uses a resistive heating element integrated with an electrically insulating structure. One useful trait is repeatable heat delivery