Testing Temperature Uniformity Across a Mica Heating Plate Surface

https://wafer-heating-guide.scriblorax.com/posts/mica-heating-plate-basics-a-guide-for-industrial-equipment-designers

In semiconductor support equipment, a mica heating plate must deliver heat in a controlled way. It uses a mica-insulated resistive heater built for plate-style heat transfer. One useful trait is custom plate geometry